德国XENOS Semiconductor Technologies GmbH
XENOS 半导体技术有限公司成立于2001 年，主要为半导体技术和纳米技术，尤其是电子或高聚焦离子束平版印刷提供工具、工艺和服务。我们的半导体平版印刷产品范围广泛，既包括附加微影机的翻新、扫描式电子显微镜（从XeDraw（10 赫兹）到直写速度为20 兆赫、40 兆赫或50 兆赫的高速微影机XPG2），也包括装备完善的FIB（聚焦离子束）、100 千电子伏特肖特基发射极电子束光刻系统。

与争竞伙伴相比，我们的平版印刷设备具有以下优势：
● 直写速度快，可达50 赫兹像素频率。
● 智能化写入原函数，特别适用于光学仪器，如：在写入速度最大情况下，通过专门多项式生成硬件，由第三级仿样拟合生成的弯曲写入原函数。
● 可灵活用于未来的研究和应用，由于广泛使用了可编程逻辑和复杂精密的固件，并具有内核导入功能，产品的硬件、软件和固件能在数分钟内轻松升级。
● 与经验丰富的平版印刷用户合作开发达到最新技术发展水平的、便于用户使用的软件。
我们的团队由优秀熟练的平版印刷和半导体技术专家组成，在我们灵活性较高的产品的帮助下，
他们能根据客户在使用过程中遇到的问题找到最佳解决方案。
鉴于此，我们能与客户合作设计新产品、完善新产品，如将最高写入速度最佳化。

XENOS Semiconductor Technologies GmbH was founded in 2001 and is dealing with
tools, processes and services for Semiconductor- and Nanotechnology, especially Electron or
Focussed Ion Beam Lithography (FIB).
Our product portfolio of Semiconductor Lithography Systems ranges from add-on writers
retrofitting to Scanning Electron Microscopes (from XeDraw (10 MHz) to the dedicated high
speed writer XPG2 with 20, 40 or 50 MHz writing speed) to fully equipped FIB and 100 keV
Schottky emitter EBL systems.
Our Lithography Systems stand out from our competitors by several important advantages:
● high writing speeds up to 50 MHz pixel frequency
● intelligent writing primitives, especially for optical devices, e.g. curved writing
primitives generated by 3rd order spline approximations with full writing speed
due to a dedicated polynomial generation hardware
● extreme flexibility for future-proof research applications: hard-, soft- and firmware
can be easily upgraded within only minutes due to extensive use of programmable
logic and sophisticated firmware- and kernel boot functions.
● user friendly state-of-art software developed in cooperation with experienced
lithography users.
All members of our team are highly qualified and skillfull lithography and semiconductor
technology experts that can assist to find the appropriate solution for our customer?s
application problems with the help of the high flexibility of our advanced products.
Therefore, we are able to design and optimize our products in cooperation with our customers,
e.g. optimizations for high writing speed.