日本Crestec Corporation
日本CRESTEC公司为21世纪先进纳米科技提供尖端的电子束纳米光刻(EBL)系统,或称电子束直写(EBD)、电子束爆光系统。型号包括CABL-9000C系列、CABL-9000TF系列、8000TF系列、CABL-4200LB及CABL-4200LB。其中CABL-9000C系列最小线宽可达8nm,最小束斑直径2nm,套刻精度 20nm(mean+2σ),拼接精度 20nm(mean+2σ)。
At the Crestec, we are commited to be an excellent company which is trusted throughout the world by implementation of customer first, respect for the individual, challenge to innovation and solidity of our team. We also cotribute to offer the Crestec's low-cost and high-quality products.