英国Ionoptika
日本ULVAC-PHI公司于2004年11月12日宣布,与离子枪生产商英国Ionoptika公司联合开发出了以C60为离子源的溅镀机离了枪,并已经开始销售。其特点是能够在不破坏成份和结构的情况下以1nm(深度方向)的误差,对有机薄膜样本的表面进行切削或溅射清除。该公司表示“可对有机薄膜进行低损伤蚀刻,这在此前是做不到的”。
Ionoptika is an ion beam technology company committed to the development of high performance and novel ion beam systems.
We offer these systems to instrument manufacturers and to research groups for upgrade of analytical or process instrumentation.
We manufacture a range of ion guns with related electronic and vacuum components for use in micromachining and analysis applications. Custom design work is also undertaken, including complete instrument systems.
The following areas of expertise are available at Ionoptika:
Ion-optical design
Mechanical design - using 3D CAD.
Electronics design – high voltage and digital control
Manufacture and Test of UHV assemblies
Manufacture and Test of electronics
Instrumental control software
Ionoptika has a wealth of experience in ion beam science within its own technology group. We also benefit from close association with leading scientists in the fields of ion-optical design and analytical chemistry.
Location and Facilities
Ionoptika is located at Warrior Park, just outside Southampton in the U.K. In the Warrior Park unit, Ionoptika is fully equipped with assembly and test facilities for ion guns, sources, or other high vacuum instrumentation