德国Aurion Anlagentechnik GmbH 
Aurion 公司生产、销售使用等离子体处理技术和无线射频元件进行表面处理和表面涂层的设备。
使用的等离子技术包括：
● RIE ( 活性离子蚀刻）清洁和活化技术；微波下游的等离子技术
● PVD ( 物理蒸汽沉积，扩散) 涂层技术；PECVD ( 等离子体增强化学蒸气沉积) 技术
● 大气等离子活化技术
除了成套的系统与元件外，Aurion 公司还可以在等离子与无线电频率技术方面提供专业咨询服务，并进行人员培训。
在提供标准表面处理系统的同时，Aurion 还为有特殊要求的客户提供定制服务，例如：根据客户特殊需求提供整套解决方案。
Aurion 的等离子系统目前应用于以下行业：
● 半导体
● 医药技术
● 光学
● 汽车行业
Aurion delivers systems for treatment and coating of surfaces by means of plasma processes
as well as radio frequency components.
Plasma technologies employed are:
● Cleaning and activation with RIE (Reactive Ion Etching) and Microwave
downstream plasma
● Coating with PVD (Physical Vapour Deposition, Sputtering) and PECVD (Plasma
Enhanced Chemical Vapour Deposition)
● Activation with atmospheric plasma
Apart from systems and components Aurion offers its expertise in the area of plasma and radio
frequency technology for consulting services and training.
While providing a series of standard systems for surface treatment, Aurion also develops and
builds custom made systems, i.e. solutions which are tailored to the specific requirements of
the customer.
Aurion?s plasma systems are used in the following industrial areas:
● Semiconductor
● Medical technology
● Optics
● Automotive