德国VisiTec Microtechnik 
德国Visitec捷高公司的超大试样室Mira型扫描电镜。
• 被检物的最大尺寸可为直径700mm，高600mm，长1400mm，最大重量可达300公斤，真空室长1400，宽1100和高1200mm。
• 分辨本领4nm，加速电压0.3kV—20kV。
• 是一种新的计算机控制、非破坏性的检查分析测试装置，可用于工业产品的生产，质量管理，微机加工和工艺品的检查研究等。
VisiTec Microtechnik GmbH is an innovative medium-sized enterprise.

Its main purpose is to develop and produce MIRA, the Large Chamber Scanning Electron Microscopes (LC-SEM). As the world’s largest one of its kind, it is used in various cases since it was presented in 1995.

Moreover VisiTec specializes in vacuum technology and in non-destructive analysis. Various detectors are available for different needs.

In particular the FIB and the FTIR offer a very accurate analysis of surfaces, even in molecular dimensions. Mostly, the LC-SEM is usually applied in Research and Development.

History
The company was founded by director Martin Klein in 1994 in Grevesmuehlen/Germany. Due to the wide range of possible applications the business was orientated even globally. In 1997 a Japanese company was the first international client. While further development completes the technology, the LC-SEM is of interest for more and more institutions.

A short chronology
Year Milestone
1994 VisiTec Microtechnik is founded by Martin Klein in Grevesmuehlen/Germany
1995 Presentation of a prototype at the Hannover fair of Industry
The first microscope delivered to the Fraunhofer Institute Aachen
1996 The Grevesmuehlen Service Center opens in order to provide innovative technology to other clients
1997 The first foreign order of a Japanese client is arranged by the Japan Chamber of foreign trade
1998 / 1999 The North America Market opens, in particular the USA
2004 Further recruitment of more employees and establishment of a larger facility (Gruener Weg)
2005 Integration of FIB (focused ion beam) and FTIR (Fourier transformed Infrared spectroscopy)