德国Nanoplus
Nanoplus GmbH 公司于1998年自Würzburg 大学技术物理系脱离而创建。其主要活动是将研究结果应用于实际程序与产品内,其专门从事光电子学仪器与客户指定的微-毫微结构塑造。目前在nanoplus内有15名员工。该公司装备有一条完整的处理线用于半导体激光制造,其包括不同的干式蚀刻系统、喷溅系统、脱水器、掩模对准器、激光装备工具等等,均处于250 m2 的绝对无尘室设备中(级别100-10000)。该公司还具有12 m2 的实验室空间以用于技术支持(高纯度气体与水的制备)。
Nanoplus的主产品是与返回激光偶合的复合体,它是通过nanoplus自己的独特技术制造的。通过此项技术实现的DFB激光具有高单独模式产出,高效率,以及高侧模式抑制率(>40dB),其与低背射敏感度与端口接合。近些年所开发的该技术不要求过度生长,即可应用与各种半导体,包括基于GaSb、InP与GaAs 的材料。基于这些材料系统,nanoplus制造波长范围为0.7到2.5μm的DFB与Fabry-Perot 激光二极管,应用于传感技术与分光镜技术。
此外,nanoplus制造波长范围为5到12μm 的量子级串联激光。
Nanoplus was founded in 1998 as a spin-off from the department of Technical Physics at Würzburg University to transfer research results into applications and products with a specialization in optoelectronics devices and customer specific micro- and nano-structuring.
The company is equipped with a complete process line for semiconductor laser fabrication, comprising different dry etch systems, sputter systems, evaporators, mask aligners, laser mounting facilities, etc. in a 250 m2 clean room (class 100-10000). Nanoplus facilities also comprise 120 m2 of laboratory space for technical supply (a/c, high purity gases, water preparation) and 500 m2 of office and characterization space.
A key product of nanoplus are distributed feedback (DFB) laser diodes based on a unique and patented technology. DFB lasers realized by this technique have a high single mode yield, high efficiencies as well as high sidemode supression ratio (SMSR) around 40dB combined with low back reflection sensitivity and thresholds. The technology has been optimized for a wide variety of semiconductor heterostructures including GaSb, InP and GaAs based materials. Based on these material systems, nanoplus produces DFB and Fabry-Perot laser diodes in the wavelength range from 0.7 up to 2.8 µm for sensing and spectroscopy as well as telecom applications.