Auto500GB是专门设计用于手套箱集成使用的镀膜设备，满足氧气或水汽敏感的材料镀膜的应用要求。该系统配了***个特殊结构的真空腔室，可直接与市场上大多数手套箱集成到***起。真空腔室的前门可竖直滑动开关，嵌入手套箱内，并占用很少的手套箱空间；其后门是铰链扇式开关，能在不影响手套箱内气氛的情况下轻松维护腔室内工艺组件。
 

镀膜源选项包括热阻蒸发源、精密控温的有机蒸发源、磁控溅射源以及电子束蒸发源。

Auto500GB is a coating equipment specially designed for glove box integration to meet the application requirements of coating materials sensitive to oxygen or water vapor.The system is fitted with a specially constructed vacuum chamber that integrates directly with most glove boxes on the market.The front door of the vacuum chamber can be vertically sliding switch, which is embedded in the glove box ａnd occupies little space in the glove box.The back door is a hinged fan switch that allows easy maintenance of the chamber process components without affecting the atmosphere in the glove box.

Options for coating sources include thermal resistance evaporation sources, precision temperature controlled organic evaporation sources, magnetron sputtering sources, ａnd electron beam evaporation sources.