美***SONIX 晶圆检测设备 AutoWafe Pro.

SONIX AutoWafer Pro™ 是专为全自动晶圆检测设计的机型，主要应用在Bond wafer，MEMS 内部空洞、离层检测，TSV量测方面。

● 使用于200和300mm晶圆
● 符合******净化间标准
● Cassette装载，全自动检测，支持FOUP或FOSB机械臂
● 支持200mm & 300mm SECS/GEM协议
● KLARF输出文件

AutoWafe Pro, SONIX wafer detection device.

SONIX AutoWafer Pro™ is designed for fully automatic wafer detection, mainly for Bond wafer, MEMS internal cavity detection, separation detection, ａnd TSV measurement.

● for 200 mm ａnd 300mm wafers

● comply with the standard of first class purification room

Cassette loaded, fully automatic detection, support for FOUP or FOSB manipulator

● support 200mm & 300mm SECS/GEM protocol

● KLARF output file