High vacuum 3.0 nm at 30 kV (SE) 4.0 nm at 30 kV (BSE)* 8.0 nm at 3 kV (SE)
High vacuum with beam deceleration option 7.0 nm at 3 kV(BD mode* + vCD*) Low vacuum 3.0 nm at 30 kV (SE) 4.0 nm at 30k V (BSE)* 10 nm at 3 kV (SE)
Extended vacuum mode (ESEM) 3.0 nm at 30 kV (SE) *optional |