FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I质量流量控制器OMEGA

130 + Gas Calibration, including Pure Gas and Mixed Gas

Display pressure, temperature and mass flow at the same time

Keyboard interface is easy to operate

NIST Traceability Standard

Full range of 0.5 SCCM~500 SLM

Typical response time is 50-100 ms

Adjustment ratio is 200:1

Location insensitivity

Accuracy of (+0.8%) readings

RS232 standard

Customized Real-time Gas Mixing Programming

Up to 20 user-defined gas mixtures can be stored

FMA-LP2600A series mass flow controllers use differential pressure principle to detect and control mass flow in laminar flow field. The laminar flow element (LFE) in the flowmeter forces the gas to enter the laminar flow state (after rectification). According to Poiseuille equation, there is a linear relationship between volume flow and pressure drop in this region. The differential pressure sensor is used to measure the pressure drop of LFE at fixed distance. At the same time, the volume flow rate can be accurately determined according to the gas viscosity. A separate absolute temperature and pressure sensor is introduced, and the gas flow rate is corrected according to a series of standard conditions. This standardized flow is usually referred to as mass flow, expressed in units such as standard cubic centimeter/minute (SCCM) or standard liter/minute (SLM).

FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I质量流量控制器OMEGA

130+气体校准，包括纯气体和混合气体

同时显示压力、温度和质量流量

按键界面操作简单

NIST可追溯性标准

0.5 SCCM~500 SLM满量程范围

典型响应时间为50~100 ms

调节比为200：1

位置不敏感

±0.8%读数精度

RS232标准

自定义实时气体混合编程

最多可存储20种用户定义的气体混合物

FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I质量流量控制器OMEGA

控制器使用真正的比例阀联接到 流体，以便使用积分式 PID回路控制器来控制流量。标准设备包括 0 ~ 5V输出（可选4 ~ 20 mA）和RS232 通信。可从前端键盘或 通过RS232通信调整气体 选择功能和设定值。体积流量、质量 流量、绝对压力以及温度均可 通过RS232连接查看或记录。 在距离为46m（150’）的同***串口连接上，同时***多可与26台设备进行多点通信。